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[IEEE 2004 IEEE International Reliability Physics Symposium. - Phoenix, AZ, USA (25-29 April 2004)] 2004 IEEE International Reliability Physics Symposium. Proceedings - A new breakdown failure mechanism in HfO/sub 2/ gate dielectric

✍ Scribed by Ranjan, R.; Pey, K.L.; Tang, L.J.; Tung, C.H.; Groeseneken, G.; Radhakrishnan, M.K.; Kaczer, B.; Degraeve, R.; De Gendt, S.

Book ID: 125847120
Publisher: IEEE
Year: 2004
Weight: 477 KB
Category: Article
ISBN-13: 9780780383159
DOI: 10.1109/RELPHY.2004.1315350

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