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[IEEE 2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual - Orlando, FL, USA (30 April-3 May 2001)] 2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual (Cat. No.00CH37167) - Non-destructive resonant frequency measurement on MEMS actuators

✍ Scribed by Smith, N.F.; Tanner, D.M.; Swanson, S.E.; Miller, S.L.

Book ID: 121228667
Publisher: IEEE
Year: 2001
Weight: 1007 KB
Category: Article
ISBN-13: 9780780365872
DOI: 10.1109/RELPHY.2001.922888

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