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[IEEE 2000 5th International Workshop on Statistical Metrology - Honolulu, HI, USA (11 June 2000)] 2000 5th International Workshop on Statistical Metrology (Cat.No.00TH8489 - Accurate prediction of IC manufacturing distributions using improved response surface fitting

✍ Scribed by Nilsen, V.K.; Walton, A.J.

Book ID: 126743326
Publisher: IEEE
Year: 2000
Tongue: English
Weight: 282 KB
Edition: 2000
Category: Article
ISBN-13: 9780780358966
DOI: 10.1109/IWSTM.2000.869301

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