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[IEEE 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (13-14 June 1988)] 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Multilevel gold metallization

✍ Scribed by Haberle, K.; Langheinrich, W.; Dudek, V.; Hefner, H.-A.; Isernhagen, R.

Book ID: 126768521
Publisher: IEEE
Year: 1988
Weight: 713 KB
Category: Article
DOI: 10.1109/VMIC.1988.14183

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