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[IEEE 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors - Portland, OR, USA (28-30 Sept. 2004)] 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004. - Design of a hot wall-based low temperature annealing system and its process applications

✍ Scribed by Woo Sik Yoo, ; Fukada, T.; Murakami, T.; Kitaek Kang, ; Foggiato, J.

Book ID: 126667934
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 644 KB
Category: Article
ISBN-13: 9780780384774
DOI: 10.1109/RTP.2004.1441941

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