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[IEEE 10th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP 2002 - Vancouver, BC, Canada (25-27 Sept. 2002)] 10th IEEE International Conference of Advanced Thermal Processing of Semiconductors - Application of 100% ozone gas process to rapid low-temperature oxidation

✍ Scribed by Nonaka, H.; Ichimura, S.; Nishiguchi, T.; Morikawa, Y.; Kekura, M.; Miyamoto, M.

Book ID: 118024686
Publisher: IEEE
Year: 2002
Weight: 348 KB
Volume: 0
Category: Article
ISBN-13: 9780780374652
DOI: 10.1109/rtp.2002.1039449

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