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[IEEE International Conference on Advanced Thermal Processing of Semiconductors - Charleston, NC, USA (23-26 Sept. 2003)] 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors. RTP 2003 - Design of halogen lamps for rapid thermal processing

✍ Scribed by Ranish, J.M.

Book ID: 118024687
Publisher: IEEE
Year: 2003
Weight: 340 KB
Volume: 0
Category: Article
ISBN-13: 9780780378742
DOI: 10.1109/rtp.2003.1249148

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