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[RTP 9th International Conference on Advanced Thermal Processing of Semiconductors. RTP 2001 - Anchorage, AK, USA (25-29 Sept. 2001)] 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 - Electromagnetic induction heating for cold wall rapid thermal processing

✍ Scribed by Thompson, K.; Booske, J.H.; Gianchandani, Y.; Cooper, R.; Bykov, Yu.; Eremeev, A.; Plotnikov, I.

Book ID: 125443750
Publisher: RTP
Year: 2001
Weight: 523 KB
Category: Article
DOI: 10.1109/rtp.2001.1013765

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