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[IEEE 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors - Portland, OR, USA (28-30 Sept. 2004)] 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004. - In situ calibration of lightpipe radiometers for rapid thermal processing between 300°C to 700°C

✍ Scribed by Kimes, W.A.; Kreider, K.G.; Ripple, D.C.; Tsai, B.K.

Book ID: 118148688
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 756 KB
Volume: 0
Category: Article
ISBN-13: 9780780384774
DOI: 10.1109/rtp.2004.1441956

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