✦ LIBER ✦

ICP etching of polycrystalline diamonds: Fabrication of diamond nano-tips for AFM cantilevers

✍ Scribed by Uetsuka, H.; Yamada, T.; Shikata, S.

Book ID: 121400976
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 747 KB
Volume: 17
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2007.12.071

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Fabrication of cantilever with self-shar

Fabrication of cantilever with self-sharpening nano-silicon-tip for AFM applications

✍ Jia-dong Li, Jie Xie, Wei Xue, Dong-min Wu 📂 Article 📅 2012 🏛 Springer-Verlag 🌐 English ⚖ 695 KB

Diamond tip fabrication by air-plasma et

Diamond tip fabrication by air-plasma etching of diamond with an oxide mask

✍ Baik, Eun-Song; Baik, Young-Joon; Jeon, Dongryul 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 217 KB

Beam-assisted-etching technique for fabr

Beam-assisted-etching technique for fabrication of single crystal diamond field emitter tip

✍ J. Taniguchi; J. Yokoyama; M. Komuro; H. Hiroshima; I. Miyamoto 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 773 KB

We fabricated a single crystal diamond field emitter tip using focused ion beam assisted etching and investigated characteristics of electron emission from single crystal diamond. Electron emission from single crystal diamond is field emission. FIB assisted etching is very useful to reduce emission

Diamond tips and cantilevers for the cha

Diamond tips and cantilevers for the characterization of semiconductor devices

✍ Malavé, A; Oesterschulze, E; Kulisch, W; Trenkler, T; Hantschel, T; Vandervorst, 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 272 KB

Cycle of two-step etching process using

Cycle of two-step etching process using ICP for diamond MEMS applications

✍ Yamada, Takatoshi; Yoshikawa, Hiromichi; Uetsuka, Hiroshi; Kumaragurubaran, Somu 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 587 KB

Fabrication of nano-structured diamond f

Fabrication of nano-structured diamond films for SAOS-2 cell cultivation

✍ Babchenko, Oleg ;Kromka, Alexander ;Hruska, Karel ;Kalbacova, Marie ;Broz, Anton 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 709 KB

## Abstract The present work reports on application of gold, nickel, and diamond nano‐particles as a masking material for realization of diamond 3D nano‐structures after a low power (100 W) plasma etching process in a gas mixture of CF~4~/O~2~. Obtained 3D structures strongly depend on the masking