✦ LIBER ✦
Cycle of two-step etching process using ICP for diamond MEMS applications
✍ Scribed by Yamada, Takatoshi; Yoshikawa, Hiromichi; Uetsuka, Hiroshi; Kumaragurubaran, Somu; Tokuda, Norio; Shikata, Shin-ichi
- Book ID
- 121990926
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 587 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0925-9635
No coin nor oath required. For personal study only.