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Hydrogen incorporation and its structural effect on a-C:H films deposited by magnetron sputtering

✍ Scribed by B Popescu; A Tagliaferro; F De Zan; E.A Davis

Book ID
117150346
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
119 KB
Volume
266-269
Category
Article
ISSN
0022-3093

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## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radio‐frequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), X‐ray diffraction, and X‐ray photoelec