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Effects of Al incorporation on the mechanical and tribological properties of Ti-doped a-C:H films deposited by magnetron sputtering

✍ Scribed by Xianjuan Pang; Lei Shi; Peng Wang; Yanqiu Xia; Weimin Liu


Book ID
108079414
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
911 KB
Volume
11
Category
Article
ISSN
1567-1739

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