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Hydrogen in amorphous and microcrystalline silicon films prepared by hydrogen dilution

โœ Scribed by Kroll, U.; Meier, J.; Shah, A.; Mikhailov, S.; Weber, J.


Book ID
121439758
Publisher
American Institute of Physics
Year
1996
Tongue
English
Weight
274 KB
Volume
80
Category
Article
ISSN
0021-8979

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