✦ LIBER ✦
From amorphous to microcrystalline silicon films prepared by hydrogen dilution using the VHF (70 MHz) GD technique
✍ Scribed by U Kroll; J Meier; P Torres; J Pohl; A Shah
- Book ID
- 117149037
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 164 KB
- Volume
- 227-230
- Category
- Article
- ISSN
- 0022-3093
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