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Hydrogenated amorphous silicon films prepared from trisilane by windowless hydrogen discharge lamp

✍ Scribed by Akira Yoshida; Shinji Ikeda; Hiroshi Tsuchimoto

Book ID: 115988953
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 203 KB
Volume: 164-166
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(93)90500-w

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## Abstract Recent model calculations are studied of Ance et al. concerning the valence electron density and hydrogen concentration in hydrogenated amorphous silicon films prepared by glow discharge decomposition of silane. This study is essentially necessitated by the fact that the model of Ance e