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Hydrogen diffusion at moderate temperatures in p-type Czochralski silicon

✍ Scribed by Huang, Y. L.; Ma, Y.; Job, R.; Ulyashin, A. G.

Book ID: 120153416
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 360 KB
Volume: 96
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1812379

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