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Hydrogen content and annealing of memory quality silicon-oxynitride films

✍ Scribed by H. J. Stein

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Correlation of refractive index and sili

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✍ Dirk Schalch; Arthur Scharmann; Robert Wolfrat 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 383 KB

Annealing behavior of silicon nitride an

✍ Takeshi Kamada; Takashi Hirao; Masatoshi Kitagawa; Kentaro Setsune; Kiyotaka Was 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 262 KB

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✍ P. Danesh 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 293 KB

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✍ Schalch, D. ;Scharniann, A. ;Wolffut, R. 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 258 KB

Spectroscopic ellipsometry and photolumi

✍ Sandeep Kohli; Jeremy A. Theil; Patrick R. McCurdy; Patricia C. Dippo; Richard K 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 930 KB