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Hydrogen anneal of E′ centers in thermal SiO2 on Si

✍ Scribed by Zheng Li; S.J. Fonash; E.H. Poindexter; M. Harmatz; F. Rong; W.R. Buchwald


Book ID
115987774
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
265 KB
Volume
126
Category
Article
ISSN
0022-3093

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