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Thermal annealing behaviour of Si/SiO2 structures

✍ Scribed by V.G. Lifshits; I.G. Kaverina; V.V. Korobtsov; A.A. Saranin; A.V. Zotov


Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
808 KB
Volume
135
Category
Article
ISSN
0040-6090

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