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Continuously tunable photoluminescence from Si+-implanted and thermally annealed SiO2 films

โœ Scribed by T Fischer; V Petrova-Koch; K Shcheglov; M.S Brandt; F Koch

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
477 KB
Volume
276
Category
Article
ISSN
0040-6090

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Silicon nanocrystals (nc-Si) embedded in SiO 2 glassy mixture have been prepared on glass substrates and silicon and germanium wafers by r.f. co-sputtering and post-annealing in a vacuum. Using Raman spectrometry, photoluminescence and electrical conductivity measurements, we have investigated the s