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Homoepitaxial SiC deposition by MBE with Si and monomethlysilane

✍ Scribed by M. Komatz; K. Matsuishi; S. K. Hong; T. Yao

Publisher: John Wiley and Sons
Year: 2006
Tongue: English
Weight: 592 KB
Volume: 3
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.200564136

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