Isotopically-Purified Si and 3C-SiC Film Growth by an Ion-Beam Deposition Method

✍ Scribed by Tsubouchi, N. ;Chayahara, A. ;Mokuno, Y. ;Kinomura, A. ;Horino, Y.

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 127 KB
• Volume: 189
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(200201)189:1<169::aid-pssa169>3.0.co;2-6