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Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition

โœ Scribed by Z.C. Feng; C.C. Tin; R. Hu; J. Williams


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
791 KB
Volume
266
Category
Article
ISSN
0040-6090

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