✦ LIBER ✦

Highly selective SiO2/Si reactive ion beam etching withlow energy fluorocarbon ions

✍ Scribed by E. Collard; C. Lejeune; J.P. Grandchamp; J.P. Gilles; P. Scheiblin

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ion bombardment energy and SiO[sub 2]/Si

✍ S. Wang; A. E. Wendt 📂 Article 📅 2001 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 343 KB

Reactive and chemically assisted ion bea

✍ MA Carter; GF Goldspink 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 529 KB

Reactive ion beam etching of Si/SiO2 sys

✍ D. Korzec; T. Kessler; J. Engemann 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 998 KB

Study of reactive ion etching of Si and

✍ Guadalupe Fortuño 📂 Article 📅 1988 🏛 Springer 🌐 English ⚖ 759 KB

Deep single step vertical ICP–RIE etchin

✍ Messow, Ferdinand; Welch, Colin; Eifert, Alexander; Ang, Wei Chung; Hoe, Nee Shi 📂 Article 📅 2014 🏛 Elsevier Science 🌐 English ⚖ 565 KB

Etching SiO2 in a reactive ion beam: Bar

📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 90 KB