Etching SiO2 in a reactive ion beam: Barbara A. Heath Solid-State Technology 75 (Oct 1981)

• Book ID: 104157136
• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 90 KB
• Volume: 15
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(84)80056-7