✦ LIBER ✦
Deep single step vertical ICP–RIE etching of ion beam sputter deposited SiO2/Si multilayer stacks
✍ Scribed by Messow, Ferdinand; Welch, Colin; Eifert, Alexander; Ang, Wei Chung; Hoe, Nee Shiuan; Kusserow, Thomas; Hillmer, Hartmut
- Book ID
- 122134142
- Publisher
- Elsevier Science
- Year
- 2014
- Tongue
- English
- Weight
- 565 KB
- Volume
- 113
- Category
- Article
- ISSN
- 0167-9317
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