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High temperature characterization of high-κ dielectrics on SiC

✍ Scribed by M.H. Weng; R. Mahapatra; P. Tappin; B. Miao; S. Chattopadhyay; A.B. Horsfall; N.G. Wright

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 161 KB
Volume: 9
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2006.10.032

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## Abstract A technique for the characterization of microwave dielectric properties of high dielectric constant thick films at room temperature is proposed, using multilayered coplanar waveguide transmission lines with high dielectric constant thick films deposited over the lines.Besides the simpli