Etching titanium nitride gate stacked on high-κ dielectric

✍ Scribed by J.C. Gerharz; K. Padmaraju; J. Moers; D. Grützmacher

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 533 KB
• Volume: 88
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2011.02.049