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Etching titanium nitride gate stacked on high-κ dielectric

✍ Scribed by J.C. Gerharz; K. Padmaraju; J. Moers; D. Grützmacher


Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
533 KB
Volume
88
Category
Article
ISSN
0167-9317

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