✦ LIBER ✦
Experimental evidence of suppression on oxygen vacancy formation in Hf based high-κ gate dielectrics with La incorporation
✍ Scribed by Chun-Chang Lu; Kuei-Shu Chang-Liao; Yu-Fen Cheng; Tien-Ko Wang
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 621 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.