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High selectivity plasma etching of InN over GaN

✍ Scribed by Hyun Cho; J. Hong; T. Maeda; S. M. Donovan; C. R. Abernathy; S. J. Pearton; R. J. Shul; J. Han

Book ID: 107457722
Publisher: Springer US
Year: 1998
Tongue: English
Weight: 123 KB
Volume: 27
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-998-0118-z

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