✦ LIBER ✦
Recovery of Dry Etching–Induced Damage inn-GaN by Nitrogen Plasma Treatment at Growth Temperature
✍ Scribed by X. Wang; G. Yu; B. Lei; X. Wang; C. Lin; Y. Sui; S. Meng; M. Qi; A. Li
- Book ID
- 107453845
- Publisher
- Springer US
- Year
- 2007
- Tongue
- English
- Weight
- 194 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0361-5235
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