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High-resolution focused ion beam lithography

✍ Scribed by Shinji Matsui; Yoshikatsu Kojima; Yukinori Ochiai; Toshiyuki Honda; Katsumi Suzuki

Book ID: 107920442
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 572 KB
Volume: 11
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(90)90144-i

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