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High resistivity Co and Ti silicide formation on silicon-on-insulator substrates

✍ Scribed by S.L. Hsia; G.E. McGuire; T.Y. Tan; P.L. Smith; W.T. Lynch

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
513 KB
Volume
253
Category
Article
ISSN
0040-6090

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