✦ LIBER ✦
Ti/Ni bilayers on silicon: Sputter-induced intermixing, rapid thermal annealing and ternary silicide formation
✍ Scribed by E Horache; J Van Der Spiegel; J.E Fischer
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 478 KB
- Volume
- 177
- Category
- Article
- ISSN
- 0040-6090
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