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High rate sputter deposition equipment

✍ Scribed by Vacuum Technology Assoc Inc

Book ID: 103458230
Publisher: Elsevier Science
Year: 1974
Tongue: English
Weight: 108 KB
Volume: 24
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(74)90067-0

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