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Simulation of sputter deposition at high pressures

✍ Scribed by T. Smy


Book ID
121850128
Publisher
AVS (American Vacuum Society)
Year
1997
Tongue
English
Weight
402 KB
Volume
15
Category
Article
ISSN
0734-2101

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Simulation of particle transport in high
✍ Takeo Nakano; Shigeru Baba πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 322 KB

Transport properties of sputtered particles in a gas environment have been studied at finite temperatures using a recently developed new Monte-Carlo simulation code. In this code, the thermal motion of gas atoms has been incorporated to the collision frequency and the scattering process. The situati