Simulation of particle transport in high pressure sputtering

✍ Scribed by Takeo Nakano; Shigeru Baba

• Book ID: 104266138
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 322 KB
• Volume: 51
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(98)00239-5

✦ Synopsis

Transport properties of sputtered particles in a gas environment have been studied at finite temperatures using a recently developed new Monte-Carlo simulation code. In this code, the thermal motion of gas atoms has been incorporated to the collision frequency and the scattering process. The situation that the gas atoms are not frozen affects critically on the transport process of particles of low energies since the effect of the thermal motion of the colliding gas atom becomes important on the change in speed and direction with scattering. In this report, we show the time evolution of position and energy of sputtered particles. The manner how the mass difference of sputtered particles works is demonstrated graphically.