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High-performance MgO thin films for PDPs with a high-rate sputtering-deposition process

✍ Scribed by Masaharu Terauchi; Jun Hashimoto; Hikaru Nishitani; Yusuke Fukui; Michiko Okafuji; Hitoshi Yamashita; Hiroshi Hayata; Takafumi Okuma; Hitoshi Yamanishi; Mikihiko Nishitani; Masatoshi Kitagawa

Book ID
117970305
Publisher
Society for Information Display
Year
2008
Tongue
English
Weight
902 KB
Volume
16
Category
Article
ISSN
1071-0922

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πŸ“œ SIMILAR VOLUMES

Magnetron sputtering system stabilisatio
Magnetron sputtering system stabilisation for high rate deposition of AlN films
✍ Alexey A Fomin; Vladislav Akhmatov; Sergey V Selishchev πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 574 KB

The stabilisation of a planar magnetron sputtering system for reactive sputtering ofAlN in a gaseous mixture ofAr and highly active NH, was examined. The helical instability in the cathode plasma sheath was observed and methods for its damping were proposed. It was found that the deposition oft-axis