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High Fe solubility in InP by high temperature ion implantation

✍ Scribed by B Fraboni; A Gasparotto; T Cesca; F Priolo; G Scamarcio; A Mazzone; M Troccoli

Book ID: 114164412
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 146 KB
Volume: 178
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(00)00477-8

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