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Annealing behavior of high temperature implanted Fe impurities in n-InP

✍ Scribed by T. Cesca; A. Gasparotto; B. Fraboni; F. Priolo

Book ID: 113822675
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 271 KB
Volume: 216
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2003.11.028

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