✦ LIBER ✦

High energy implantation by ion projection

✍ Scribed by J. Meijer; A. Stephan

Book ID: 118564391
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 296 KB
Volume: 41-42
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(98)00059-8

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