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High energy Au-implantation into silicon: Radiation damage and microscopical distribution of implanted atoms

โœ Scribed by J.K.N. Lindner; N. Hecking; E. Te Kaat


Book ID
113278477
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
835 KB
Volume
26
Category
Article
ISSN
0168-583X

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