✦ LIBER ✦

High deposition rate processes for the fabrication of microcrystalline silicon thin films

✍ Scribed by Michard, S.; Meier, M.; Grootoonk, B.; Astakhov, O.; Gordijn, A.; Finger, F.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

An approach to device grade amorphous an

✍ Michio Kondo; Akihisa Matsuda 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 824 KB

High deposition rates for microcrystalli

✍ P Hapke; F Finger 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 90 KB

Improve silane utilization for silicon t

✍ Shengzhi Xu; Xiaodan Zhang; Yang Li; Shaozhen Xiong; Xinhua Geng; Ying Zhao 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 307 KB

High rate deposition of microcrystalline

✍ Zewen Zuo; Yu Wang; Jin Lu; Junzhuan Wang; Lin Pu; Yi Shi; Youdou Zheng 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 967 KB

Fabrication of High-Quality Boron-Doped

✍ Yunfeng Yin; Jidong Long; Selvaraj Venkataraj; Juan Wang; Armin G. Aberle 📂 Article 📅 2012 🏛 Elsevier ⚖ 381 KB

Development of a hollow cathode plasma s

✍ Dimitrakellis, P; Amanatides, E; Mataras, D; Rapakoulias, D E 📂 Article 📅 2011 🏛 Institute of Physics 🌐 English ⚖ 369 KB