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Fabrication of High-Quality Boron-Doped Microcrystalline Silicon Thin Films on Several Types of Substrates

✍ Scribed by Yunfeng Yin; Jidong Long; Selvaraj Venkataraj; Juan Wang; Armin G. Aberle

Book ID: 116427121
Publisher: Elsevier
Year: 2012
Weight: 381 KB
Volume: 25
Category: Article
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2012.07.005

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