Atomic‐scale formation of ultrasmooth surfaces on sapphire substrates for high‐quality thin‐film fabrication

✍ Scribed by Yoshimoto, M.; Maeda, T.; Ohnishi, T.; Koinuma, H.; Ishiyama, O.; Shinohara, M.; Kubo, M.; Miura, R.; Miyamoto, A.

• Book ID: 111909214
• Publisher: American Institute of Physics
• Year: 1995
• Tongue: English
• Weight: 654 KB
• Volume: 67
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.114313