Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters

✍ Scribed by Aliza Aini Md Ralib, Anis Nurashikin Nordin, Hanim Salleh, Raihan Othman

• Book ID: 118787764
• Publisher: Springer-Verlag
• Year: 2012
• Tongue: English
• Weight: 805 KB
• Volume: 18
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-012-1550-9