✦ LIBER ✦

High-density MIM capacitors using Al2O3 and AlTiOx dielectrics

✍ Scribed by Chen, S.B.; Lai, C.H.; Chin, A.; Hsieh, J.C.; Liu, J.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

High-performance MIM capacitor using ALD

✍ Shi-Jin Ding; Hang Hu; Lim, H.F.; Kim, S.J.; Yu, X.F.; Chunxiang Zhu; Li, M.F.; 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 258 KB

High-Performance MIM Capacitors Using Hf

✍ Lu Zhang; Wei He; D. Chan; Byung Jin Cho 📂 Article 📅 2010 🏛 IEEE 🌐 English ⚖ 125 KB

Very high density RF MIM capacitors (17

✍ Yang, M.Y.; Huang, C.H.; Chin, A.; Chunxiang Zhu; Cho, B.J.; Li, M.F.; Dim-Lee K 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 285 KB

ALD HfO2 and Al2O3 as MIM Capacitor Diel

✍ Yota, J. 📂 Article 📅 2013 🏛 The Electrochemical Society 🌐 English ⚖ 47 KB

MIM capacitors using atomic-layer-deposi

✍ Hang Hu, ; Chunxiang Zhu, ; Xiongfei Yu, ; Chin, A.; Li, M.F.; Byung Jin Cho, ; 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 302 KB

A high-density MIM capacitor (13 fF/μm/s

✍ Xiongfei Yu, ; Chunxiang Zhu, ; Hang Hu, ; Chin, A.; Li, M.F.; Byung Jin Cho, ; 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 271 KB