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Heterogeneous effect in carbonized porous silicon

✍ Scribed by B. M. Kostishko; Sh. R. Atazhanov; I. P. Puzov; S. Ya. Solomatin; Yu. S. Nagornov

Book ID
110124272
Publisher
SP MAIK Nauka/Interperiodica
Year
2000
Tongue
English
Weight
60 KB
Volume
26
Category
Article
ISSN
1063-7850

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## Abstract Thermal carbonization of porous silicon (PS) at 820 Β°C under acetylene atmosphere is an appropriate method for humidity sensing purposes. It produces stable and hydrophilic surface still maintaining originally large specific surface area of PS. We report the temperature dependence of va