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Effects of treatment temperature on thermally-carbonized porous silicon hygroscopicity

✍ Scribed by J. Paski; M. Björkqvist; J. Salonen; V-P. Lehto

Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
87 KB
Volume
2
Category
Article
ISSN
1862-6351

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✍ Björkqvist, M. ;Paski, J. ;Salonen, J. ;Lehto, V.-P. 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 103 KB

## Abstract Thermal carbonization of porous silicon (PS) at 820 °C under acetylene atmosphere is an appropriate method for humidity sensing purposes. It produces stable and hydrophilic surface still maintaining originally large specific surface area of PS. We report the temperature dependence of va